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【中文】一种三层膜结构的Low-E玻璃及其生产工艺
【EN】Low-E glass with three-layer membrane structure and production technology thereof

申请(专利)号:CN201010530471.5国省代码:江苏 32
申请(专利权)人:【中文】俞志稳【EN】Yu Zhiwen
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摘要:
【中文】本发明涉及一种三层膜结构的Low-E玻璃及其生产工艺。玻璃基片上由里到外依次复合有三层膜,中间的膜为纯银薄膜,纯银薄膜两侧的膜为金属氧化物膜。本发明产品设置了三层膜结构,中间的膜为纯银薄膜,两侧为金属氧化物膜,金属氧化物膜对纯银薄膜提供保护,增加了玻璃的耐磨性,同时作为膜层中间的纯银薄膜增加了色彩的纯度和光透射度,节能环保。本发明工艺实施难度低、方法简便,形成的三层膜结构均匀一致,对设备的要求较低,容易实现。【EN】Paragraph:The invention relates to a Low-E glass with a three-layer membrane structure and a production technology thereof. Three membrane layers are sequentially composed on a glass substrate from the inner side to the outer side, wherein the middle membrane is a pure silver thin membrane; the membranes on the two sides of the pure silver thin membrane are metallic oxide membranes. The product of the invention is provided with the three-layer membrane structure, wherein the middle membrane is the pure silver thin membrane and the metallic oxide membranes are on the two sides; the metallic oxide membranes protect the pure silver thin membrane and increase the abrasive resistance for the glass; the pure silver thin membrane in the middle of the membrane layers increases the purity of the color and light penetration, and is environment-friendly. The technology disclosed by the invention has advantages of low implementation difficulty, simple and convenient method, lower requirement on equipment and easy achievement. In addition, the three-layer membrane structure formed is uniform.

主权项:
【中文】一种三层膜结构的Low‑E玻璃及其生产工艺,包括有Low‑E玻璃基片,其特征在于:玻璃基片上由里到外依次复合有三层膜,中间的膜为纯银薄膜,纯银薄膜两侧的膜为金属氧化物膜,具体加工步骤如下:1)、将Low‑E玻璃基片垂直放置在架子上,送入10‑1帕数量级的真空环境内;2)、向真空环境内通入适量的惰性气体Ar或反应气体O2、N2,并保持真空度稳定;3)、将靶材Ag、Si分别嵌入两个阴极,并在与阴极垂直的水平方向置入磁场构成磁控靶;4)、以磁控靶为阴极,加上直流或交流电源,在高电压的作用下,惰性气体或反应气体发生电离;5)、将嵌入Ag、Si的两个阴极靶,先后靠近玻璃表面来回移动,形成三成均匀的薄膜。【EN】1. the Low-E glass and the production technique thereof of a trilamellar membrane structure; Include the Low-E glass substrate, it is characterized in that: be compounded with trilamellar membrane on the glass substrate from inside to outside successively, the intermediary film is the fine silver film; The film of fine silver film both sides is a metal oxide film, and concrete procedure of processing is following: 1) sends in the vacuum environment of the 10-1 handkerchief order of magnitude, on the top of the shelf, the vertical placement of Low-E glass substrate; 2), in vacuum environment, feed an amount of rare gas element Ar or reactant gases O , N , and keep vacustat; 3), target Ag, Si are embedded two negative electrodes respectively, and inserting magnetic field constitute magnetic controlling target with the vertical horizontal direction of negative electrode; 4), be negative electrode with the magnetic controlling target, add direct current or AC power, under high-tension effect, rare gas element or reactant gases generation ionization; 5), will embed two negative electrode targets of Ag, Si, successively move around near glass surface, form three one-tenth uniform films.


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说明书

一种三层膜结构的Low-E玻璃及其生产工艺

技术领域

本发明涉及一种Low-E玻璃及其生产工艺,尤其涉及一种三层膜结构


的Low-E玻璃及其生产工艺。


背景技术

由于有着优异的热性能和良好的光学性能,Low-E玻璃的运用越来越广


泛,现有的Low-E玻璃大多是用液体金属或金属粉末直接喷射到热玻璃表面


上,随着玻璃的冷却,在玻璃表面形成一层金属薄膜,而为了增加玻璃的耐


磨性能,往往需要增加金属薄膜的厚度,因而造成其光透射度和透明性较差。


发明内容

本发明为了解决以上问题提供了一种耐磨性好、光透射度好、色彩鲜明


的三层膜结构的Low-E玻璃及其生产工艺。


本发明的技术方案是:包括有Low-E玻璃基片,其特征在于:玻璃基


片上由里到外依次复合有三层膜,中间的膜为纯银薄膜,纯银薄膜两侧的膜


为金属氧化物膜,具体加工步骤如下:


1)、将Low-E玻璃基片垂直放置在架子上,送入10-1帕数量级的真空环境


内;


2)、向真空环境内通入适量的惰性气体Ar或反应气体O2、N2,并保持真空


度稳定;


3)、将靶材Ag、Si分别嵌入两个阴极,并在与阴极垂直的水平方向置入磁


场构成磁控靶;


4)、以磁控靶为阴极,加上直流或交流电源,在高电压的作用下,惰性气体


或反应气体发生电离;


5)、将嵌入Ag、Si的两个阴极靶,先后靠近玻璃表面来回移动,形成三成


均匀的薄膜。


所述的金属氧化物为金属硅氧化物。


本发明产品设置了三层膜结构,中间的膜为纯银薄膜,两侧为金属氧化


物膜,金属氧化物膜对纯银薄膜提供保护,增加了玻璃的耐磨性,同时作为


膜层中间的纯银薄膜增加了色彩的纯度和光透射度,节能环保。


本发明工艺实施难度低、方法简便,形成的三层膜结构均匀一致,对设


备的要求较低,容易实现。


具体实施方式

一种三层膜结构的Low-E玻璃及其生产工艺,包括有Low-E玻璃基片,


玻璃基片上由里到外依次复合有三层膜,中间的膜为纯银薄膜,纯银薄膜两


侧的膜为金属氧化物膜,具体加工步骤如下:


1)、将Low-E玻璃基片垂直放置在架子上,送入10-1帕数量级的真空环境


内;


2)、向真空环境内通入适量的惰性气体Ar或反应气体O2、N2,并保持真空


度稳定;


3)、将靶材Ag、Si分别嵌入两个阴极,并在与阴极垂直的水平方向置入磁


场构成磁控靶;


4)、以磁控靶...

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